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MKS GE50A - High-Precision Elastomer-Sealed Mass Flow Controller (MFC)
SKU GE50A-BASE
Price
$0.00
Eliminate flow instability and gas waste in your critical processes.
The MKS GE50A is the definitive solution for semiconductor processing, PVD/CVD coatings, and bioprocesses that demand metrological rigor and speed. Designed to replace legacy models without requiring gas line modifications, it provides the reliability that researchers and production engineers seek for publication-ready data and industrial-scale production.
Technical Advantages (Operational Benefits):
- ±1% Setpoint Accuracy: Fine-tuned control ensuring process recipe integrity.
- Response Time <750ms: Near-instantaneous stabilization to reduce TTM (Time-to-Market).
- Integrated Multi-Gas Capability: Change the operating gas via software (library of >150 gases), reducing the need for spare inventory.
- Elastomer-Sealed (Viton): High durability and ease of maintenance in industrial environments.
Technical Specifications:
| Flow Ranges | 5 to 50,000 sccm (N2 equivalent) |
| Repeatability | ±0.3% of Reading |
| Interface | Digital (RS485, EtherCAT) or Analog (0-5V, 4-20mA) |
| Maximum Pressure | 150 psig |
| Warm-up Time | <30 minutes |
Why Ohmini?
With over 15 years of experience in Brazil’s leading laboratories and industries, Ohmini guarantees specialized local technical support and direct backing from the manufacturer, MKS Instruments.
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