MKS GM50A - High-Precision Metal-Sealed Mass Flow Controller (MFC)
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Eliminate flow instability and gas waste in your critical processes with metal-sealed reliability.
The MKS GM50A is the premier solution for high-purity semiconductor processing, PVD/CVD coatings, and demanding industrial applications that require superior leak integrity and metrological rigor. As a metal-sealed MFC, it offers the cleanliness and stability necessary for the most sensitive gas delivery systems, providing publication-ready data and robust industrial performance.
Technical Advantages (Operational Benefits):
±1% Setpoint Accuracy: Exceptional control ensuring total process recipe integrity.
Response Time <750ms: Ultra-fast stabilization to accelerate your Time-to-Market (TTM).
Metal-Sealed Integrity: Provides superior leak tightness and cleanliness for high-purity environments.
Integrated Multi-Gas Capability: Reconfigure for over 150 gases via software, optimizing your spare parts inventory.
Technical Specifications:
Flow Ranges | 5 to 50,000 sccm (N2 equivalent) |
Repeatability | ±0.3% of Reading |
Interface | Digital (RS485, EtherCAT) or Analog (0-5V, 4-20mA) |
Maximum Pressure | 150 psig |
Seal Material | Metal (Stainless Steel) |
Why Ohmini? With over 15 years of leadership in Brazil’s advanced laboratories and industries, Ohmini provides specialized local technical support and direct partnership with MKS Instruments.
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