MKS GM50A - High-Precision Metal-Sealed Mass Flow Controller (MFC)

Eliminate flow instability and gas waste in your critical processes with metal-sealed reliability.

The MKS GM50A is the premier solution for high-purity semiconductor processing, PVD/CVD coatings, and demanding industrial applications that require superior leak integrity and metrological rigor. As a metal-sealed MFC, it offers the cleanliness and stability necessary for the most sensitive gas delivery systems, providing publication-ready data and robust industrial performance.

Technical Advantages (Operational Benefits):

• ±1% Setpoint Accuracy: Exceptional control ensuring total process recipe integrity.
• Response Time <750ms: Ultra-fast stabilization to accelerate your Time-to-Market (TTM).
• Metal-Sealed Integrity: Provides superior leak tightness and cleanliness for high-purity environments.
• Integrated Multi-Gas Capability: Reconfigure for over 150 gases via software, optimizing your spare parts inventory.

Technical Specifications:

Why Ohmini?
With over 15 years of leadership in Brazil’s advanced laboratories and industries, Ohmini provides specialized local technical support and direct partnership with MKS Instruments.